| Contributors | 6 |
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| Foreword | 8 |
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| Acknowledgments | 10 |
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| Contents | 11 |
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| Galileo Comes to the Surface! | 21 |
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| 1. INTRODUCTION | 21 |
| 2. COATINGS | 22 |
| 3. CHALLENGES AND OPPORTUNITIES | 24 |
| 4. LEITMOTIV AND OBJECTIVE | 41 |
| ACKNOWLEDGMENTS | 43 |
| REFERENCES | 44 |
| Size Effects on Deformation and Fracture of Nanostructured Metals | 47 |
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| 1. INTRODUCTION | 47 |
| 2. MECHANICAL TESTING OF NANOSTRUCTURED BULK AND THIN FILM MATERIALS | 48 |
| 3. DEFORMATION AND FRACTURE UNDER MICROSTRUCTURAL CONSTRAINT | 54 |
| 4. DEFORMATION UNDER DIMENSIONAL CONSTRAINT | 77 |
| 5. CONCLUDING REMARKS | 86 |
| REFERENCES | 87 |
| Defects and Deformation Mechanisms in Nanostructured Coatings | 98 |
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| 1. INTRODUCTION | 98 |
| 2. DEFORMATION MECHANISMS IN NANOCRYSTALLINE COATINGS: GENERAL VIEW | 100 |
| 3. LATTICE DISLOCATION SLIP | 102 |
| 4. GRAIN BOUNDARY SLIDING | 105 |
| 5. ROTATIONAL DEFORMATION MECHANISMS | 109 |
| 6. GRAIN BOUNDARY DIFFUSIONAL CREEP (COBLE CREEP) AND TRIPLE JUNCTION DIFFUSIONAL CREEP | 113 |
| 7. INTERACTION BETWEEN DEFORMATION MODES IN NANOCRYSTALLINE COATING MATERIALS: EMISSION OF DISLOCATIONS FROM GRAIN BOUNDARIES | 115 |
| 8. DEFECTS AND PLASTIC DEFORMATION RELEASING INTERNAL STRESSES IN NANOSTRUCTURED FILMS AND COATINGS | 117 |
| 9. CONCLUDING REMARKS | 121 |
| ACKNOWLEDGMENTS | 122 |
| REFERENCES | 122 |
| Nanoindentation in Nanocrystalline Metallic Layers: A Molecular Dynamics Study on Size Effects | 129 |
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| 1. INTRODUCTION | 129 |
| 2. ATOMISTIC MODELING | 131 |
| 3. THE DEFORMATION MECHANISMS AT THE ATOMIC LEVEL IN NANO- SIZED GRAINS BENEATH THE INDENTER | 141 |
| 4. DISCUSSION AND OUTLOOK | 158 |
| REFERENCES | 159 |
| Electron Microscopy Characterization of Nanostructured Coatings | 163 |
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| 1. INTRODUCTION | 163 |
| 2. EXPERIMENTAL METHODOLOGY AND MATERIALS | 166 |
| 3. MICROSTRUCTURE OF DIAMOND-LIKE CARBON MULTILAYERS | 182 |
| 4. CHARACTERIZATION OF TiN AND TiNÒ(Ti,Al)N MULTILAYERS | 201 |
| 5. OUTLOOK | 219 |
| ACKNOWLEDGMENTS | 229 |
| REFERENCES | 229 |
| Measurement of Hardness and Young's Modulus by Nanoindentation | 236 |
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| 1. INTRODUCTION | 236 |
| 2. THEORY OF INDENTATION MEASUREMENTS | 237 |
| 3. INFLUENCE AND DETERMINATION OF INSTRUMENT COMPLIANCE | 246 |
| 4. INFLUENCE AND DETERMINATION OF INDENTER AREA FUNCTION | 253 |
| 5. ADDITIONAL CORRECTIONS FOR HIGH-ACCURACY DATA ANALYSIS | 259 |
| 6. SPECIFIC PROBLEMS WITH THE MEASUREMENT OF THIN HARD COATINGS | 263 |
| 7. LIMITS FOR COMPARABLE HARDNESS MEASUREMENTS | 271 |
| 8. YOUNG'S MODULUS MEASUREMENTS WITH SPHERICAL INDENTERS | 275 |
| ACKNOWLEDGMENTS | 278 |
| REFERENCES | 278 |
| The Influence of the Addition of a Third Element on the Structure and Mechanical Properties of Transition- Metal- Based Nanostructured Hard Films: Part I- Nitrides | 281 |
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| 1. INTRODUCTION | 281 |
| 2. THE ADDITION OF ALUMINUM TO TM NITRIDES | 283 |
| 3. TERNARY NITRIDES WITH TM ELEMENTS FROM THE IV, V, AND VI GROUPS | 287 |
| 4. THE SPECIFIC CASE OF THE
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